Operation modes of the FALCON ion source as a part of the AMS cluster tool

Published Online: Jun 22, 2015

Page range: 327 - 330

Received: May 19, 2014

Accepted: May 05, 2015

DOI: https://doi.org/10.1515/nuka-2015-0059

Keywords

FALCON, ion sourcem, surface wave, cluster tool

© Oleksii Girka et al.

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