Operation modes of the FALCON ion source as a part of the AMS cluster tool

Publicado en línea: 22 jun 2015

Páginas: 327 - 330

Recibido: 19 may 2014

Aceptado: 05 may 2015

DOI: https://doi.org/10.1515/nuka-2015-0059

Palabras clave

FALCON, ion sourcem, surface wave, cluster tool

© Oleksii Girka et al.

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.