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Measurement Science Review
Volume 15 (2015): Issue 1 (February 2015)
Open Access
Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
E. Sysoev
E. Sysoev
,
R. Kulikov
R. Kulikov
,
I. Vykhristyuk
I. Vykhristyuk
and
Yu. Chugui
Yu. Chugui
| Mar 11, 2015
Measurement Science Review
Volume 15 (2015): Issue 1 (February 2015)
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Published Online:
Mar 11, 2015
Page range:
9 - 12
Received:
Oct 03, 2014
Accepted:
Jan 24, 2015
DOI:
https://doi.org/10.1515/msr-2015-0002
Keywords
Phase shifting interferometry
,
nanorelief measurement
,
measurement error
© E. Sysoev, R. Kulikov, I. Vykhristyuk, Yu. Chugui
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.