Effect of target power on the physical properties of Ti thin films prepared by DC magnetron sputtering with supported discharge

Published Online: Feb 24, 2017

Page range: 173 - 180

Received: Jul 05, 2016

Accepted: Jan 05, 2017

DOI: https://doi.org/10.1515/msp-2017-0022

Keywords

Ti thin films, supported discharge/triode mode, DC magnetron sputtering, target power

© 2017 A. Kavitha, R. Kannan, S. Rajashabala

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