Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Pubblicato online: 13 mar 2015

Pagine: 175 - 184

Ricevuto: 02 set 2014

Accettato: 01 dic 2014

DOI: https://doi.org/10.1515/msp-2015-0036

Parole chiave

aluminum nitride epilayer, atomic force microscopy, magnetron sputtering, substrate, surface roughness

© 2015

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.