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Macroscopic Thin Film Deposition Model for the Two-Reactive-Gas Sputtering Process

András Kelemen

András Kelemen

Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of TransylvaniaTg. Mureş,
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Kelemen, András
, 
Domokos Biró

Domokos Biró

Department of Mechanical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of TransylvaniaTg. Mureş,
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Biró, Domokos
, 
Albert-Zsombor Fekete

Albert-Zsombor Fekete

Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of TransylvaniaTg. Mureş,
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Fekete, Albert-Zsombor
, 
László Jakab-Farkas

László Jakab-Farkas

Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of TransylvaniaTg. Mureş,
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Jakab-Farkas, László
 and 
Róbert Rossi Madarász

Róbert Rossi Madarász

Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of TransylvaniaTg. Mureş,
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Madarász, Róbert Rossi
  
Sep 09, 2017
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Published Online: Sep 09, 2017
Page range: 62 - 78
Received: Feb 15, 2017
DOI: https://doi.org/10.1515/auseme-2017-0005
Keywords
© 2016 András Kelemen et al., published by De Gruyter Open
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Kelemen, András
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of TransylvaniaTg. Mureş
Biró, Domokos
Department of Mechanical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of TransylvaniaTg. Mureş
Fekete, Albert-Zsombor
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of TransylvaniaTg. Mureş
Jakab-Farkas, László
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of TransylvaniaTg. Mureş
Madarász, Róbert Rossi
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of TransylvaniaTg. Mureş
Language:
English
Publication timeframe:
1 times per year
Journal Subjects:
Engineering, Electrical Engineering, Information Technology, Energy Engineering, Mechanical Engineering, Tools and Methods, Process Engineering and Industrial Engineering
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