Development and Characterization of Surface Micro-Machined MEMS Based Varactor
, , oraz | 13 gru 2017
Data publikacji: 13 gru 2017
Zakres stron: 94 - 107
DOI: https://doi.org/10.21307/ijssis-2017-382
Słowa kluczowe
© 2010 Subha Chakraborty et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
This paper presents complete behavioral analysis of a surface micro-machined MEMS varactor for frequency tuning application in voltage controlled oscillators in RF applications with high Quality factor and tunability. The dimensions of the MEMS device have been optimized with Finite Element Method based CoventorWare analysis and verified through lumped parameter analysis in Saber platform. The MEMS varactor has been fabricated with the PolyMUMPs process. The paper also describes the Mechanical and electrical characterization of the MEMS varactor to meet the designed specification.