<abstract xmlns="http://www.w3.org/1999/xhtml">

<p>This paper presents complete behavioral analysis of a surface micro-machined MEMS varactor for frequency tuning application in voltage controlled oscillators in RF applications with high Quality factor and tunability. The dimensions of the MEMS device have been optimized with Finite Element Method based CoventorWare analysis and verified through lumped parameter analysis in Saber platform. The MEMS varactor has been fabricated with the PolyMUMPs process. The paper also describes the Mechanical and electrical characterization of the MEMS varactor to meet the designed specification.</p></abstract>

This paper presents complete behavioral analysis of a surface micro-machined MEMS varactor for frequency tuning application in voltage controlled oscillators in RF applications with high Quality factor and tunability. The dimensions of the MEMS device have been optimized with Finite Element Method based CoventorWare analysis and verified through lumped parameter analysis in Saber platform. The MEMS varactor has been fabricated with the PolyMUMPs process. The paper also describes the Mechanical and electrical characterization of the MEMS varactor to meet the designed specification.

Development and Characterization of Surface Micro-Machined MEMS Based Varactor

International Journal on Smart Sensing and Intelligent Systems

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

{"article-title":"Development and Characterization of Surface Micro-Machined MEMS Based Varactor"}

This paper presents complete behavioral analysis of a surface micro-machined MEMS varactor for frequency tuning application in voltage controlled oscillators...

Development and Characterization of Surface Micro-Machined MEMS Based Varactor

Data publikacji: 13 gru 2017

Zakres stron: 94 - 107

DOI: https://doi.org/10.21307/ijssis-2017-382

Słowa kluczowe
MEMS, varactor, VCO, capacitance tuning ratio, pull-in, SEM, vibration spectrum, LDV

© 2010 Subha Chakraborty et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Development and Characterization of Surface Micro-Machined MEMS Based Varactor

Data publikacji: 13 gru 2017

Zakres stron: 94 - 107

DOI: https://doi.org/10.21307/ijssis-2017-382

Słowa kluczoweMEMS, varactor, VCO, capacitance tuning ratio, pull-in, SEM, vibration spectrum, LDV

© 2010 Subha Chakraborty et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Słowa kluczowe
MEMS, varactor, VCO, capacitance tuning ratio, pull-in, SEM, vibration spectrum, LDV