A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes
, oraz | 13 gru 2017
O artykule
Data publikacji: 13 gru 2017
Zakres stron: 480 - 497
DOI: https://doi.org/10.21307/ijssis-2017-303
Słowa kluczowe
© 2008 Sangtak Park et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications such as laser scanning displays, optical switch matrices, and biomedical imaging systems. In this paper, various actuation mechanisms for micromirrors are described. A new geometric configuration of a stacked micromirror that is actuated by electrostatic force is proposed and analyzed to show its superior performance in terms of deflection angle, actuation voltage, and frequency response