Accesso libero

The impact of medium frequency pulsed magnetron discharge power on the single probe Langmuir measurements and resulted plasma parameters

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Cita

A Wiatrowski
Faculty of Microsystems Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372 Wroclaw, Poland
W.M Posadowski
Faculty of Microsystems Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372 Wroclaw, Poland
eISSN:
2083-134X
Lingua:
Inglese
Frequenza di pubblicazione:
4 volte all'anno
Argomenti della rivista:
Materials Sciences, other, Nanomaterials, Functional and Smart Materials, Materials Characterization and Properties