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Materials Science-Poland
Volume 34 (2016): Numero 1 (March 2016)
Accesso libero
The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis
Rafal Chodun
Rafal Chodun
,
Katarzyna Nowakowska-Langier
Katarzyna Nowakowska-Langier
,
Sebastian Okrasa
Sebastian Okrasa
e
Krzysztof Zdunek
Krzysztof Zdunek
| 27 apr 2016
Materials Science-Poland
Volume 34 (2016): Numero 1 (March 2016)
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Article Category:
Research Article
Pubblicato online:
27 apr 2016
Pagine:
126 - 131
Ricevuto:
21 lug 2015
Accettato:
16 nov 2015
DOI:
https://doi.org/10.1515/msp-2016-0007
Parole chiave
IPD method
,
magnetic filter
,
nanocrystalline films
,
thin films
© Wroclaw University of Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Fig. 1
Schematic diagram of the apparatus used in the experiment (A), wiring diagram of the coil connected with plasma accelerator (B) and photograph of the coil coupled with accelerator installed in the vacuum chamber.
Fig. 2
Photograph of full single plasma pack guided by the bent down coil of filter.
Fig. 3
Comparison of optical spectrum of magnetically filtered impulse plasma (red) with optical spectrum of plasma generated at standard apparatus of IPD method (blue).
Fig. 4
Raman spectra of AlN films deposited on silicon substrates during the experiment with magnetic filtering (top) and without filtering (bottom).
Fig. 5
Surface images of AlN films deposited by a standard apparatus (A) and by the apparatus with the filter coupled with accelerator.
Fig. 6
SEM photographs of AlN films structures deposited during the processes with the standard accelerator (left column) and using a plasma filtering (right column).