The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis

[1]Guo Q., Yoshida A., Jpn. J. Appl. Phys., 33 (1994), 2453.GuoQYoshidaAJpn. J. Appl. Phys331994245310.1143/JJAP.33.2453Search in Google Scholar

[2]Teisseyre H., Perlin P., Suski T., Grzegory I., Porowski S., Jun J., Pietraszko A., Moustakas T. D., J. Appl. Phys., 76 (1994), 2429.TeisseyreHPerlinPSuskiTGrzegoryIPorowskiSJunJPietraszkoAMoustakasT DJ. Appl. Phys761994242910.1063/1.357592Search in Google Scholar

[3]Yamashita H., Fukui K., Misawa S., Yoshida S., J. Appl. Phys., 50 (1979), 896.YamashitaHFukuiKMisawaSYoshidaSJ. Appl. Phys50197989610.1063/1.326007Search in Google Scholar

[4]Slack G.A., Tanzilli R.A., Pohl R.O., Vandersande J.W., J. Phys. Chem. Solids, 48 (1987), 641.SlackGATanzilliRAPohlROVandersandeJWJ. Phys. Chem. Solids48198764110.1016/0022-3697(87)90153-3Search in Google Scholar

[5]Chiu K.H., Chen J.H., Chen H.R., Huang R.S., Thin Solid Films, 515 (2007), 4819.ChiuKHChenJHChenHRHuangRSThin Solid Films5152007481910.1016/j.tsf.2006.12.181Search in Google Scholar

[6]Yang R.Z., Hsiung C.M., Chen H.H., Wu H.W., Shih M.C., Microwave Optic. Techn. Lett., 50 (2008), 2863.YangRZHsiungCMChenHHWuHWShihMCMicrowave Optic. Techn. Lett502008286310.1002/mop.23796Search in Google Scholar

[7]Bose S., Mazumder S.K., Solid State Electron., 62 (2011), 5.BoseSMazumderSKSolid State Electron622011510.1016/j.sse.2011.03.008Search in Google Scholar

[8]Kelekci O., Tasli P., Cetin S.S., Kasap M., Ozcelik S., Ozbay E., Curr. Appl. Phys., 12 (2012), 1600.KelekciOTasliPCetinSSKasapMOzcelikSOzbayECurr. Appl. Phys122012160010.1016/j.cap.2012.05.040Search in Google Scholar

[9]Iborra E., Olivares J., Clement M., Vergara L., Sanz-Hervás A., Sangrador J., Sensor. Actuat. A-Phys., 115 (2004), 501.IborraEOlivaresJClementMVergaraLSanz-HervásASangradorJSensor. Actuat. A-Phys115200450110.1016/j.sna.2004.03.053Search in Google Scholar

[10]Belyanin A.F., Bouilov L.L., Zhirnov V.V., Kamenev A.I., Kovalskij K.A., Spitsyn B.V., Diam. Relat. Mater., 8 (1999), 369.BelyaninAFBouilovLLZhirnovVVKamenevAIKovalskijKASpitsynBVDiam. Relat. Mater8199936910.1016/S0925-9635(98)00412-9Search in Google Scholar

[11]Qiu J.Z., Hotta Z., Watari K., Mitsuishi K., Yamazaki M., J. Eur. Ceram. Soc., 26 (2006), 385.QiuJZHottaZWatariKMitsuishiKYamazakiMJ. Eur. Ceram. Soc26200638510.1016/j.jeurceramsoc.2005.06.016Search in Google Scholar

[12]Fischer R.A., Miehr A., Ambacher O., Metzger T., Born E., J. Cryst. Growth, 170 (1997), 139.FischerRAMiehrAAmbacherOMetzgerTBornEJ. Cryst. Growth170199713910.1016/S0022-0248(96)00532-5Search in Google Scholar

[13]Tanaka Z., Hasebe Z., Inushima T., Sandhu A., Ohoya S., J. Cryst. Growth, 209 (2000), 410.TanakaZHasebeZInushimaTSandhuAOhoyaSJ. Cryst. Growth209200041010.1016/S0022-0248(99)00581-3Search in Google Scholar

[14]Dimitrova V., Manova D., Paskova T., Uzunov T., Ivanov N., Dechev D., Vacuum, 51 (1998), 161.DimitrovaVManovaDPaskovaTUzunovTIvanovNDechevDVacuum51199816110.1016/S0042-207X(98)00150-XSearch in Google Scholar

[15]Manova D., Dimitrova V., Fukarek W., Karpuzov D., Surf. Coat. Tech., 106 (1998), 205.ManovaDDimitrovaVFukarekWKarpuzovDSurf. Coat. Tech106199820510.1016/S0257-8972(98)00527-1Search in Google Scholar

[16]Nowakowska-Langier K., Wierzbiński E., Zdunek K., Kopcewicz M., Vacuum, 77 (2005), 287.Nowakowska-LangierKWierzbińskiEZdunekKKopcewiczMVacuum77200528710.1016/j.vacuum.2004.10.005Search in Google Scholar

[17]Nowakowska-Langier K., Chodun R., Nietubyc R., Minikayev R., Zdunek K., Appl. Surf. Sci., 275 (2013), 14.Nowakowska-LangierKChodunRNietubycRMinikayevRZdunekKAppl. Surf. Sci27520131410.1016/j.apsusc.2013.01.190Search in Google Scholar

[18]Nowakowska-Langier K., Zdunek K., Wierzbinski E., Surf. Coat. Tech., 204 (2010), 2564.Nowakowska-LangierKZdunekKWierzbinskiESurf. Coat. Tech2042010256410.1016/j.surfcoat.2010.01.040Search in Google Scholar

[19]Anders S., Anders A., Brown I.G., J. Appl. Phys., 74 (1993), 4239.AndersSAndersABrownIGJ. Appl. Phys741993423910.1063/1.354431Search in Google Scholar

[20]Anders A., Surf. Coat. Tech., 120 – 121 (1999), 319.AndersASurf. Coat. Tech120 – 121199931910.1016/S0257-8972(99)00460-0Search in Google Scholar

[21]Zimmer O., Surf. Coat. Tech., 200 (2005), 440.ZimmerOSurf. Coat. Tech200200544010.1016/j.surfcoat.2005.02.208Search in Google Scholar

[22]Zdunek K., Surf. Coat. Tech., 201 (2007), 4813.ZdunekKSurf. Coat. Tech2012007481310.1016/j.surfcoat.2006.07.024Search in Google Scholar

[23]Zdunek K., Nowakowska-Langier K., Chodun R., Kupczyk M., Siwak P., Vacuum, 85 (2010), 514.ZdunekKNowakowska-LangierKChodunRKupczykMSiwakPVacuum85201051410.1016/j.vacuum.2010.01.024Search in Google Scholar

[24]Collins A.T., Lightowlers E.C., Dean P.J., Phys. Rev., 158 (1967), 833.CollinsATLightowlersECDeanPJPhys. Rev158196783310.1103/PhysRev.158.833Search in Google Scholar

[25]Anders A., Thin Solid Films, 518 (2010), 4087.AndersAThin Solid Films5182010408710.1016/j.tsf.2009.10.145Search in Google Scholar