<abstract xmlns="http://www.w3.org/1999/xhtml"><p>The kinetics of the sputtered atoms from the metallic target as well as the time-space distribution of the argon metastable atoms have been investigated for DC and high power pulse magnetron discharge by means of Tunable Diode – Laser Absorption Spectroscopy (TD-LAS) and Tunable Diode – Laser Induced Fluorescence (TD-LIF). The discharge was operated in argon (5-30 mTorr) with two different targets, tungsten and aluminum, for pulses of 1 to 20 μs, at frequencies of 0.2 to 1 kHz. Peak current intensity of ~100 A has been attained at cathode peak voltage of ~1 kV. The mean velocity distribution functions and particle fluxes of the sputtered metal atoms, in parallel and perpendicular direction to the target, have been obtained and compared for DC and pulse mode.</p></abstract>

The kinetics of the sputtered atoms from the metallic target as well as the time-space distribution of the argon metastable atoms have been investigated for DC and high power pulse magnetron discharge by means of Tunable Diode – Laser Absorption Spectroscopy (TD-LAS) and Tunable Diode – Laser Induced Fluorescence (TD-LIF). The discharge was operated in argon (5-30 mTorr) with two different targets, tungsten and aluminum, for pulses of 1 to 20 μs, at frequencies of 0.2 to 1 kHz. Peak current intensity of ~100 A has been attained at cathode peak voltage of ~1 kV. The mean velocity distribution functions and particle fluxes of the sputtered metal atoms, in parallel and perpendicular direction to the target, have been obtained and compared for DC and pulse mode.

On Both Spatial And Velocity Distribution Of Sputtered Particles In Magnetron Discharge

“Alexandru Ioan Cuza” University, Department of Physics, 700506 Iasi, Romania

Annals of West University of Timisoara - Physics

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

The kinetics of the sputtered atoms from the metallic target as well as the time-space distribution of the argon metastable atoms have been investigated for DC...

On Both Spatial And Velocity Distribution Of Sputtered Particles In Magnetron Discharge

Publié en ligne: 05 oct. 2015

Pages: 43 - 57

Reçu: 28 déc. 2011

Accepté: 19 janv. 2012

DOI: https://doi.org/10.1515/awutp-2015-0007

Mots clés
pulsed magnetron, tunable diode laser spectroscopy, neutral distributions

© C. Vitelaru et al.

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

On Both Spatial And Velocity Distribution Of Sputtered Particles In Magnetron Discharge

Publié en ligne: 05 oct. 2015

Pages: 43 - 57

Reçu: 28 déc. 2011

Accepté: 19 janv. 2012

DOI: https://doi.org/10.1515/awutp-2015-0007

Mots cléspulsed magnetron, tunable diode laser spectroscopy, neutral distributions

© C. Vitelaru et al.

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Mots clés
pulsed magnetron, tunable diode laser spectroscopy, neutral distributions