On Both Spatial And Velocity Distribution Of Sputtered Particles In Magnetron Discharge
Publié en ligne: 05 oct. 2015
Pages: 43 - 57
Reçu: 28 déc. 2011
Accepté: 19 janv. 2012
© C. Vitelaru et al.
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.