Open Access

On Both Spatial And Velocity Distribution Of Sputtered Particles In Magnetron Discharge


Cite

C. Vitelaru
“Alexandru Ioan Cuza” University, Department of Physics, 700506 Iasi, Romania
V. Pohoata
“Alexandru Ioan Cuza” University, Department of Physics, 700506 Iasi, Romania
V. Tiron
“Alexandru Ioan Cuza” University, Department of Physics, 700506 Iasi, Romania
C. Costin
“Alexandru Ioan Cuza” University, Department of Physics, 700506 Iasi, Romania
G. Popa
“Alexandru Ioan Cuza” University, Department of Physics, 700506 Iasi, Romania