<abstract xml:lang="en" xmlns="http://www.w3.org/1999/xhtml"><p>A newly developed laboratory grazing-incidence small-angle X-ray scattering GISAXS system capable of statistical measurements of surface morphology at the nanometer scale was developed. The potential of the GISAXS system is compared to the AFM technique for a nanopatterned silicon surface produced by ion-beam erosion. The characteristic period of the ion-beam induced ripples and their lateral correlation length were estimated from AFM. Using GISAXS the reciprocal space map of surface morphology was measured and analyzed. The two microfocus X-ray sources emitting radiation at the Cu-Kα and Cr-Kα were used. The lateral periods of ripples obtained by the reciprocal space mapping techniques match the results of real space techniques. The setup has the potential to monitor and control the deposition process and formation of nanostructures with sufficient temporal and spatial resolution.</p></abstract>

A newly developed laboratory grazing-incidence small-angle X-ray scattering GISAXS system capable of statistical measurements of surface morphology at the nanometer scale was developed. The potential of the GISAXS system is compared to the AFM technique for a nanopatterned silicon surface produced by ion-beam erosion. The characteristic period of the ion-beam induced ripples and their lateral correlation length were estimated from AFM. Using GISAXS the reciprocal space map of surface morphology was measured and analyzed. The two microfocus X-ray sources emitting radiation at the Cu-Kα and Cr-Kα were used. The lateral periods of ripples obtained by the reciprocal space mapping techniques match the results of real space techniques. The setup has the potential to monitor and control the deposition process and formation of nanostructures with sufficient temporal and spatial resolution.

Measurement of nanopatterned surfaces by real and reciprocal space techniques

Institute of Physics SAS, Dubravska cesta 9, 84511 Bratislava, Slovakia

Erich Schmid Institute for Materials Science, Jahnstr. 12, A-8700 Leoben, Austria

Materials Center Leoben Forschung GmbH, Roseggerstr. 12, A-8700 Leoben, Austria

Leibniz-Institut für Oberflächenmodifizierung e. V., 04318 Leipzig, Germany

Incoatec GmbH, Max-Planck-Str. 2, 21502 Geesthacht, Germany

Measurement Science Review

{"article-title":"Measurement of nanopatterned surfaces by real and reciprocal space techniques"}

A newly developed laboratory grazing-incidence small-angle X-ray scattering GISAXS system capable of statistical measurements of surface morphology at the...

Measurement of nanopatterned surfaces by real and reciprocal space techniques

Publicado en línea: 21 dic 2010

Páginas: 153 - 156

DOI: https://doi.org/10.2478/v10048-010-0027-1

Palabras clave
AFM, GISAXS, nanostructures, ion-beam sputtering

This content is open access.

Measurement of nanopatterned surfaces by real and reciprocal space techniques

Publicado en línea: 21 dic 2010

Páginas: 153 - 156

DOI: https://doi.org/10.2478/v10048-010-0027-1

Palabras claveAFM, GISAXS, nanostructures, ion-beam sputtering

This content is open access.

Palabras clave
AFM, GISAXS, nanostructures, ion-beam sputtering