Reactive Magnetron Sputtering Control Based on an Analytical Condition of Stoichiometry
y 
Perfil de Orcid
András Kelemen
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia-Hungarian University of TransylvaniaMureş,
Perfil de OrcidBuscar este autor en
25 dic 2023
Acerca de este artículo
Publicado en línea: 25 dic 2023
Páginas: 74 - 85
Recibido: 15 jun 2023
DOI: https://doi.org/10.2478/auseme-2023-0006
Palabras clave
© 2023 Róbert Rossi Madarász et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
Madarász, Róbert Rossi
Doctoral School of Applied Mathematics and Applied Informatics, John von Neumann Faculty, Óbuda UniversityBudapest
Kelemen, András
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia-Hungarian University of TransylvaniaMureş