Reactive Magnetron Sputtering Control Based on an Analytical Condition of Stoichiometry
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András Kelemen
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia-Hungarian University of TransylvaniaMureş,
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25. Dez. 2023
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Online veröffentlicht: 25. Dez. 2023
Seitenbereich: 74 - 85
Eingereicht: 15. Juni 2023
DOI: https://doi.org/10.2478/auseme-2023-0006
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© 2023 Róbert Rossi Madarász et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
Madarász, Róbert Rossi
Doctoral School of Applied Mathematics and Applied Informatics, John von Neumann Faculty, Óbuda UniversityBudapest
Kelemen, András
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia-Hungarian University of TransylvaniaMureş