Login
Register
Reset Password
Publish & Distribute
Publishing Solutions
Distribution Solutions
Subjects
Architecture and Design
Arts
Business and Economics
Chemistry
Classical and Ancient Near Eastern Studies
Computer Sciences
Cultural Studies
Engineering
General Interest
Geosciences
History
Industrial Chemistry
Jewish Studies
Law
Library and Information Science, Book Studies
Life Sciences
Linguistics and Semiotics
Literary Studies
Materials Sciences
Mathematics
Medicine
Music
Pharmacy
Philosophy
Physics
Social Sciences
Sports and Recreation
Theology and Religion
Publications
Journals
Books
Proceedings
Publishers
Blog
Contact
Search
EUR
USD
GBP
English
English
Deutsch
Polski
Español
Français
Italiano
Cart
Home
Journals
Materials Science-Poland
Volume 32 (2014): Issue 2 (June 2014)
Open Access
Optimization of gas injection conditions during deposition of AlN layers by novel reactive GIMS method
Krzysztof Zdunek
Krzysztof Zdunek
,
Katarzyna Nowakowska-Langier
Katarzyna Nowakowska-Langier
,
Rafal Chodun
Rafal Chodun
,
Jerzy Dora
Jerzy Dora
,
Sebastian Okrasa
Sebastian Okrasa
and
Ewa Talik
Ewa Talik
| Jul 22, 2014
Materials Science-Poland
Volume 32 (2014): Issue 2 (June 2014)
About this article
Previous Article
Next Article
Abstract
References
Authors
Articles in this Issue
Preview
PDF
Cite
Share
Published Online:
Jul 22, 2014
Page range:
171 - 175
DOI:
https://doi.org/10.2478/s13536-013-0169-6
Keywords
plasma surface engineering
,
magnetron sputtering
,
aluminum nitride deposition
© 2013 Wroclaw University of Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Krzysztof Zdunek
Katarzyna Nowakowska-Langier
National Centre for Nuclear Research, Swierk/Otwock, Poland
Rafal Chodun
Faculty of Materials Science, Warsaw University of Technology, Warsaw, Poland
Jerzy Dora
Dora Power Systems, Wilczyce/Wroclaw, Poland
Sebastian Okrasa
Faculty of Materials Science, Warsaw University of Technology, Warsaw, Poland
Ewa Talik
Institute of Physics, Silesian University, Katowice, Poland