1. bookVolume 31 (2013): Issue 3 (August 2013)
Journal Details
License
Format
Journal
eISSN
2083-134X
ISSN
2083-1331
First Published
16 Apr 2011
Publication timeframe
4 times per year
Languages
English
access type Open Access

Silicon carbonitride layers deposited on titanium and polyurethane by PACVD method

Published Online: 29 Aug 2013
Volume & Issue: Volume 31 (2013) - Issue 3 (August 2013)
Page range: 476 - 483
Journal Details
License
Format
Journal
eISSN
2083-134X
ISSN
2083-1331
First Published
16 Apr 2011
Publication timeframe
4 times per year
Languages
English
Abstract

This work reports the results concerning formation and tribological properties of SiCxNy(H) layers deposited on Ti Grade 2 and polyurethane foil. Depending on the substrate, two variants of PACVD were used. The SiCxNy(H) layers on titanium were deposited with application of MWCVD (2.45 GHz, 2 kW). The layers on polyurethane were deposited using RFCVD (13.56 MHz, 400 W). Good adhesion between the SiCxNy(H) layers and polymeric foil was achieved by formation of a transitional C:N:H layer and incorporating Si gradient into the structure of the SiCxNy(H) layer. The chemical composition of the layers was tailored by precise control of the gaseous precursors ratios: [SiH4]/[NH3], [SIH4]/[NH3]/[CH4], [SiH4]/[CH4] or [SiH4]/[N2]/[CH4]. The structure and chemical composition of the obtained layers were subjected to further studies (FTIR, SEM/EDS). The roughness, friction coefficient and wear resistance were also measured. The results show that SiCxNy(H) layers offer attractive tribological properties which make them good candidates for various applications, including biomedical devices.

Keywords

[1] Peng Y., Zhou J., Zhang Z., Zhao B., Tan X., Appl. Surf. Sci., 256 (2010), 2189. http://dx.doi.org/10.1016/j.apsusc.2009.09.07110.1016/j.apsusc.2009.09.071Search in Google Scholar

[2] Probst D. et al., Surf. Coat. Technol., 200 (2005), 355. http://dx.doi.org/10.1016/j.surfcoat.2005.02.11110.1016/j.surfcoat.2005.02.111Search in Google Scholar

[3] Vassallo E. et al., Appl. Surf. Sci., 252 (2006), 7993. http://dx.doi.org/10.1016/j.apsusc.2005.10.01710.1016/j.apsusc.2005.10.017Search in Google Scholar

[4] Li D., Guruvenket S., Azzi M., Szpunar J. A., Klemberg-sapieha J. E., Martinu L., Surf. Coat. Technol., 204 (2010) 1616. http://dx.doi.org/10.1016/j.surfcoat.2009.10.01810.1016/j.surfcoat.2009.10.018Search in Google Scholar

[5] Jędrzejowski P., Cizek J., Amassian A., Klemberg-Sapieha J. E., Vlcek J., Martinu L., Thin Solid Films, 447–448 (2004), 201. http://dx.doi.org/10.1016/S0040-6090(03)01057-510.1016/S0040-6090(03)01057-5Search in Google Scholar

[6] Geetha M., Singh A. K., Asokamani R., Gogia A. K., Prog. Mater. Sci., 54 (2009), 397. http://dx.doi.org/10.1016/j.pmatsci.2008.06.00410.1016/j.pmatsci.2008.06.004Search in Google Scholar

[7] Liu X., Chu P. K., Ding C., Mater. Sci. and Eng., R 47 (2004), 49. http://dx.doi.org/10.1016/j.mser.2004.11.00110.1016/j.mser.2004.11.001Search in Google Scholar

[8] Whetley D., Raco L., Bernacca G., Sim I., Belcher P., Boyd J., European Journal of Cardiothoracic Surgery, 17 (2000), 440. http://dx.doi.org/10.1016/S1010-7940(00)00381-X10.1016/S1010-7940(00)00381-XSearch in Google Scholar

[9] Yamauchi R., Morita A., Tsuji T., Contact Dermatitis, 42 (2000), 52. Search in Google Scholar

[10] Ściół Kowska-Czarnecka A., Menaszek E., Kołaczkowska E., Janu’s M., Stypuła B., Engineering of Biomaterials, 81–84 (2008) 126. Search in Google Scholar

[11] Kafrouni W., Rouessac V., Julbe A., Durand J., J. Membr. Sci., 329 (2009) 130. http://dx.doi.org/10.1016/j.memsci.2008.12.02810.1016/j.memsci.2008.12.028Search in Google Scholar

[12] Kim M. T., Lee J., Thin Solid Films, 303 (1997), 173. http://dx.doi.org/10.1016/S0040-6090(97)00137-510.1016/S0040-6090(97)00137-5Search in Google Scholar

[13] Vautrin-Ul. C., Boisse-Laporte C., Benissad N., Chausse A., Leprince P. and Messina R., Prog. Org. Coat., 38 (2000) 9. http://dx.doi.org/10.1016/S0300-9440(99)00077-610.1016/S0300-9440(99)00077-6Search in Google Scholar

[14] Jurzecka M., Jonas S., Kluska S., Nowak R., Kyzioł K., Ceramics, 103 (2008), 631. Search in Google Scholar

[15] Anma H., Yoshimito Y., Warashina M., Hatanak Y., Appl. Surf. Sci., 175 - 176 (2001), 484. http://dx.doi.org/10.1016/S0169-4332(01)00127-110.1016/S0169-4332(01)00127-1Search in Google Scholar

[16] Kyzioł K., Jonas S., Tkacz-Śmiech K., Marszałek K., Vacuum, 82 (2008) 998. http://dx.doi.org/10.1016/j.vacuum.2008.01.00810.1016/j.vacuum.2008.01.008Search in Google Scholar

Recommended articles from Trend MD

Plan your remote conference with Sciendo