<abstract xml:lang="en" xmlns="http://www.w3.org/1999/xhtml"><p>This work reports the results concerning formation and tribological properties of SiCxNy(H) layers deposited on Ti Grade 2 and polyurethane foil. Depending on the substrate, two variants of PACVD were used. The SiCxNy(H) layers on titanium were deposited with application of MWCVD (2.45 GHz, 2 kW). The layers on polyurethane were deposited using RFCVD (13.56 MHz, 400 W). Good adhesion between the SiCxNy(H) layers and polymeric foil was achieved by formation of a transitional C:N:H layer and incorporating Si gradient into the structure of the SiCxNy(H) layer. The chemical composition of the layers was tailored by precise control of the gaseous precursors ratios: [SiH4]/[NH3], [SIH4]/[NH3]/[CH4], [SiH4]/[CH4] or [SiH4]/[N2]/[CH4]. The structure and chemical composition of the obtained layers were subjected to further studies (FTIR, SEM/EDS). The roughness, friction coefficient and wear resistance were also measured. The results show that SiCxNy(H) layers offer attractive tribological properties which make them good candidates for various applications, including biomedical devices.</p></abstract>

This work reports the results concerning formation and tribological properties of SiCxNy(H) layers deposited on Ti Grade 2 and polyurethane foil. Depending on the substrate, two variants of PACVD were used. The SiCxNy(H) layers on titanium were deposited with application of MWCVD (2.45 GHz, 2 kW). The layers on polyurethane were deposited using RFCVD (13.56 MHz, 400 W). Good adhesion between the SiCxNy(H) layers and polymeric foil was achieved by formation of a transitional C:N:H layer and incorporating Si gradient into the structure of the SiCxNy(H) layer. The chemical composition of the layers was tailored by precise control of the gaseous precursors ratios: [SiH4]/[NH3], [SIH4]/[NH3]/[CH4], [SiH4]/[CH4] or [SiH4]/[N2]/[CH4]. The structure and chemical composition of the obtained layers were subjected to further studies (FTIR, SEM/EDS). The roughness, friction coefficient and wear resistance were also measured. The results show that SiCxNy(H) layers offer attractive tribological properties which make them good candidates for various applications, including biomedical devices.

Silicon carbonitride layers deposited on titanium and polyurethane by PACVD method

AGH University of Science and Technology, Faculty of Material Science and Ceramics, 30 Mickiewicza Av., 30-059, Krakow, Poland

AGH University of Science and Technology, Faculty of Mechanical Engineering and Robotics, 30 Mickiewicza Av., 30-059, Krakow, Poland

Materials Science-Poland

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

This work reports the results concerning formation and tribological properties of SiCxNy(H) layers deposited on Ti Grade 2 and polyurethane foil. Depending on...

Silicon carbonitride layers deposited on titanium and polyurethane by PACVD method

Published Online: Aug 29, 2013

Page range: 476 - 483

DOI: https://doi.org/10.2478/s13536-013-0127-3

Keywords
PACVD, silicon carbonitride layers, tribology

© 2013 Wroclaw University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Silicon carbonitride layers deposited on titanium and polyurethane by PACVD method

Published Online: Aug 29, 2013

Page range: 476 - 483

DOI: https://doi.org/10.2478/s13536-013-0127-3

KeywordsPACVD, silicon carbonitride layers, tribology

© 2013 Wroclaw University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Keywords
PACVD, silicon carbonitride layers, tribology