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Proceedings of the Latvian Academy of Sciences. Section B. Natural, Exact, and Applied Sciences.
Volume 76 (2022): Issue 2 (April 2022)
Open Access
Towards Next-Generation Small-Size Boron Ion Implanting Apparatus
Jānis Blahins
Jānis Blahins
National Science Platform Platform FOTONIKA-LV, Institute of Atomic Physics and Spectroscopy, University of Latvia
Rīga, Latvia
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Blahins, Jānis
and
Arnolds Ubelis
Arnolds Ubelis
National Science Platform Platform FOTONIKA-LV, Institute of Atomic Physics and Spectroscopy, University of Latvia
Rīga, Latvia
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Ubelis, Arnolds
Jun 02, 2022
Proceedings of the Latvian Academy of Sciences. Section B. Natural, Exact, and Applied Sciences.
Volume 76 (2022): Issue 2 (April 2022)
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Published Online:
Jun 02, 2022
Page range:
198 - 203
Received:
May 24, 2021
Accepted:
Mar 27, 2022
DOI:
https://doi.org/10.2478/prolas-2022-0030
Keywords
ion implantation
,
boron ion source
,
simple implanting apparatus
© 2022 Jānis Blahins et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
