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Journals
Journal of Electrical Engineering
Volume 71 (2020): Issue 5 (September 2020)
Open Access
Fabrication of nano-patterns of photoresist by ultraviolet lithography and oxygen plasma
E Cheng
E Cheng
,
Suzhou Tang
Suzhou Tang
,
Helin Zou
Helin Zou
,
Zhengyan Zhang
Zhengyan Zhang
and
Yao Wang
Yao Wang
| Nov 26, 2020
Journal of Electrical Engineering
Volume 71 (2020): Issue 5 (September 2020)
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Article Category:
Papers
Published Online:
Nov 26, 2020
Page range:
359 - 364
Received:
Sep 16, 2020
DOI:
https://doi.org/10.2478/jee-2020-0049
Keywords
nano-patterns
,
fabrication
,
ultraviolet lithography
,
oxygen plasma
© 2020 E Cheng et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
E Cheng
School of Mechanical Engineering, Hebei University of Technology
PR China
Research Institute for Structure Technology of Advanced Equipment Hebei University of Technology
PR China
Suzhou Tang
School of Economics and Management, Tianjin University of Science and Technology
China
Helin Zou
Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology
Dalian, China
Zhengyan Zhang
School of Mechanical Engineering, Hebei University of Technology
PR China
Yao Wang
School of Mechanical Engineering, Hebei University of Technology
PR China
Research Institute for Structure Technology of Advanced Equipment Hebei University of Technology
PR China