<abstract xmlns="http://www.w3.org/1999/xhtml"><p>The paper focuses on providing an insight into the current state of computational modeling regarding reactive magnetron sputtering systems. A detailed compilation of developed models is gathered and grouped into categories based on the phenomena being modeled. The survey covers models developed for the analysis of magnetron discharges, particle-surface interactions at the target and the substrate, as well as macroscopic models. Corresponding software packages available online are also presented. After gaining the necessary insight into the current state of research, a list of the most challenging tasks is given, comparing diffierent approaches, that have been used to combat the encountered difficulties. The challenges associated with modeling tasks range from analytical complexity, mathematical know-how used for model approximation and reduction, as well as optimization between computational load and result accuracy. As a conclusion, the future challenges are compiled into a list and a probable direction in modeling is given, that is likely to be further pursued.</p></abstract>

The paper focuses on providing an insight into the current state of computational modeling regarding reactive magnetron sputtering systems. A detailed compilation of developed models is gathered and grouped into categories based on the phenomena being modeled. The survey covers models developed for the analysis of magnetron discharges, particle-surface interactions at the target and the substrate, as well as macroscopic models. Corresponding software packages available online are also presented. After gaining the necessary insight into the current state of research, a list of the most challenging tasks is given, comparing diffierent approaches, that have been used to combat the encountered difficulties. The challenges associated with modeling tasks range from analytical complexity, mathematical know-how used for model approximation and reduction, as well as optimization between computational load and result accuracy. As a conclusion, the future challenges are compiled into a list and a probable direction in modeling is given, that is likely to be further pursued.

Modeling reactive magnetron sputtering: a survey of different modeling approaches

Doctoral School of Applied Informatics and Applied Mathematics

Sapientia Hungarian University of Transylvania

Acta Universitatis Sapientiae, Informatica

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

The paper focuses on providing an insight into the current state of computational modeling regarding reactive magnetron sputtering systems. A detailed...

Modeling reactive magnetron sputtering: a survey of different modeling approaches

Published Online: Jul 16, 2020

Page range: 112 - 136

Received: May 03, 2020

Accepted: Jun 08, 2020

DOI: https://doi.org/10.2478/ausi-2020-0008

Keywords
mathematical modeling, parameter identification, control theory, computer simulation, reactive magnetron sputtering

© 2020 Rossi Róbert Madarász et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Modeling reactive magnetron sputtering: a survey of different modeling approaches

Published Online: Jul 16, 2020

Page range: 112 - 136

Received: May 03, 2020

Accepted: Jun 08, 2020

DOI: https://doi.org/10.2478/ausi-2020-0008

Keywordsmathematical modeling, parameter identification, control theory, computer simulation, reactive magnetron sputtering

© 2020 Rossi Róbert Madarász et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Keywords
mathematical modeling, parameter identification, control theory, computer simulation, reactive magnetron sputtering