Structural and Optical Properties of Aluminium Nitride Thin Films Fabricated Using Pulsed Laser Deposition and DC Magnetron Sputtering on Various Substrates
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Mar 16, 2024
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Published Online: Mar 16, 2024
Page range: 5 - 16
DOI: https://doi.org/10.2478/adms-2024-0001
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© 2024 Ihor Virt et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Virt, Ihor
Drohobych State Pedagogical UniversityUkraine
Potera, Piotr
Institute of Materials Engineering, College of Natural Sciences, University of RzeszowPoland
Wisz, Grzegorz
Institute of Materials Engineering, College of Natural Sciences, University of RzeszowPoland
Dziedzic, Andrzej
Institute of Physics, College of Natural Sciences, University of RzeszowPoland
Cieniek, Bogumił
Institute of Materials Engineering, College of Natural Sciences, University of RzeszowPoland
Lopatynskyi, Ivan
Lviv Polytechnic National UniversityLviv, Ukraine
Frugynskyi, Marian
Lviv Polytechnic National UniversityLviv, Ukraine