Fabrication of High Frequency Surface Acoustic Wave (SAW) Devices for Real Time Detection of Highly Toxic Chemical Vapors
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Sep 01, 2015
About this article
Published Online: Sep 01, 2015
Page range: 1601 - 1623
Received: May 05, 2015
Accepted: Jul 12, 2015
DOI: https://doi.org/10.21307/ijssis-2017-821
Keywords
© 2015 Upendra Mittal et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
In this paper, a low cost fabrication of sub micron features size SAW device with conventional lithography and their application for toxic chemical vapor detection has been presented. The SAW devices with different interdigital transducer (IDT) electrodes line widths were designed and fabricated. The fabricated SAW devices features had an accuracy of ± 0.1 μm. Frequency response of the SAW devices was measured with vector network analyzer for design parameter confirmation. The fabricated devices have been configured in multisensory oscillator configuration and tested with chemical ware fare agents simulants at very low concentration (ppb).