Fabrication of High Frequency Surface Acoustic Wave (SAW) Devices for Real Time Detection of Highly Toxic Chemical Vapors

In this paper, a low cost fabrication of sub micron features size SAW device with conventional lithography and their application for toxic chemical vapor detection has been presented. The SAW devices with different interdigital transducer (IDT) electrodes line widths were designed and fabricated. The fabricated SAW devices features had an accuracy of ± 0.1 μm. Frequency response of the SAW devices was measured with vector network analyzer for design parameter confirmation. The fabricated devices have been configured in multisensory oscillator configuration and tested with chemical ware fare agents simulants at very low concentration (ppb).