A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications such as laser scanning displays, optical switch matrices, and biomedical imaging systems. In this paper, various actuation mechanisms for micromirrors are described. A new geometric configuration of a stacked micromirror that is actuated by electrostatic force is proposed and analyzed to show its superior performance in terms of deflection angle, actuation voltage, and frequency response

Language:: English

Publication timeframe:: 1 times per year
Journal Subjects:: Engineering, Introductions and Overviews, Engineering, other

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A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

Sangtak Park

So-Ra Chung

John T.W. Yeow

Published Online: Dec 13, 2017

Page range: 480 - 497

DOI: https://doi.org/10.21307/ijssis-2017-303

KeywordsMicromirror, MEMS, Electrostatic Force Actuation, Deflection Angle, Endoscope, OCT (Optical Coherence Tomography), Stacked Micromirror Configuration

© 2008 Sangtak Park et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Keywords
Micromirror, MEMS, Electrostatic Force Actuation, Deflection Angle, Endoscope, OCT (Optical Coherence Tomography), Stacked Micromirror Configuration