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Journals
Measurement Science Review
Volume 17 (2017): Issue 6 (December 2017)
Open Access
Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis
Jie Chen
Jie Chen
,
Jie Liu
Jie Liu
,
Xingrui Wang
Xingrui Wang
,
Longfei Zhang
Longfei Zhang
,
Xiao Deng
Xiao Deng
,
Xinbin Cheng
Xinbin Cheng
and
Tongbao Li
Tongbao Li
| Nov 22, 2017
Measurement Science Review
Volume 17 (2017): Issue 6 (December 2017)
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Published Online:
Nov 22, 2017
Page range:
264 - 268
Received:
Jul 30, 2017
Accepted:
Nov 13, 2017
DOI:
https://doi.org/10.1515/msr-2017-0032
Keywords
Pitch evaluation
,
nano-grating standard
,
line edge roughness
,
atomic force microscope
© by Xiao Deng
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.