1. bookVolume 15 (2015): Issue 1 (February 2015)
Journal Details
License
Format
Journal
eISSN
1335-8871
First Published
07 Mar 2008
Publication timeframe
6 times per year
Languages
English
access type Open Access

Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

Published Online: 11 Mar 2015
Volume & Issue: Volume 15 (2015) - Issue 1 (February 2015)
Page range: 9 - 12
Received: 03 Oct 2014
Accepted: 24 Jan 2015
Journal Details
License
Format
Journal
eISSN
1335-8871
First Published
07 Mar 2008
Publication timeframe
6 times per year
Languages
English
Abstract

In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.

Keywords

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