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Materials Science-Poland
Volume 34 (2016): Issue 4 (December 2016)
Open Access
Scanning capacitance microscopy characterization of AIIIBV epitaxial layers
Adam Szyszka
Adam Szyszka
,
Michał Obłąk
Michał Obłąk
,
Tomasz Szymański
Tomasz Szymański
,
Mateusz Wośko
Mateusz Wośko
,
Wojciech Dawidowski
Wojciech Dawidowski
and
Regina Paszkiewicz
Regina Paszkiewicz
| Jan 04, 2017
Materials Science-Poland
Volume 34 (2016): Issue 4 (December 2016)
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Published Online:
Jan 04, 2017
Page range:
845 - 850
Received:
Apr 19, 2016
Accepted:
Sep 07, 2016
DOI:
https://doi.org/10.1515/msp-2016-0104
Keywords
scanning capacitance microscopy (SCM)
,
atomic force microscopy (AFM)
,
GaAs
,
InGaAs
,
AlGaN/GaN
© 2016 Wroclaw University of Technology
This article is distributed under the terms of the Creative Commons Attribution Non-Commercial License, which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.