[[1] Thelemann T., Thust H., Hintz M., Microelectron. Int., 19 (3) (2002), 19.10.1108/13565360210445005]Search in Google Scholar
[[2] Jurków D., Golonka L., Int. J. Appl. Ceram. Tec., 10 (2013), 671.10.1111/j.1744-7402.2012.02763.x]Search in Google Scholar
[[3] Bittner A., Schmidt U., J. Eur. Ceram. Soc., 29 (1) (2009), 99.]Search in Google Scholar
[[4] Bartsch H., Albrecht A., Hoffmann M., Müller J., J. Micromech. Microeng., 22 (2012), 015004.10.1088/0960-1317/22/1/015004]Search in Google Scholar
[[5] Nowak D., Miś E., Dziedzic A., Kita J., Microelectron. Reliab., 49(6) (2009), 600.10.1016/j.microrel.2009.02.019]Search in Google Scholar
[[6] Fischer M., Bartsch H., Pawlowski B., Mach M., Gade R., Barth S., Hofmann M., Müller J., Nsti-Nanotech., 3 (2008), 157.]Search in Google Scholar
[[7] Malecha K., Gancarz I., Golonka L. J., J. Micromech. Microeng., 19 (10) (2009), 105016.10.1088/0960-1317/19/10/105016]Search in Google Scholar
[[8] Ibanez-Garcia N., Martinez-Cisneros C., Valdes F., Alonso J., Trac-Trend. Anal. Chem., 27 (1) (2008), 24.10.1016/j.trac.2007.11.002]Search in Google Scholar
[[9] Vasudev A., Kaushik A., Jones K., Bhansali S., Microfluid. Nanofluic., 14 (3 – 4) (2013), 683.10.1007/s10404-012-1087-3]Search in Google Scholar
[[10] Bembnowicz P., Małodobra M., Kubicki W., Szczepańska P., Górecka-Drzazga A., Dziuban J., Jonkisz A., Karpiewska A., Dobosz T., Golonka L., Sensor. Actuat. B-Chem., 150 (2010), 715.10.1016/j.snb.2010.08.015]Search in Google Scholar
[[11] Smetana W., Balluch B., Stangl G., Gaubitzer E., Edetsberger M., Köhler G., Microelectron. Eng., 84 (2007), 1240.10.1016/j.mee.2007.01.155]Search in Google Scholar
[[12] Malecha K., Remiszewska E., Pijanowska D., Sensor. Actuat. B-Chem., 190 (2014), 873.10.1016/j.snb.2013.09.082]Search in Google Scholar
[[13] Ceramtec Ceramtape Datasheet, accessed 15.07.2014.]Search in Google Scholar
[[14] Kita J., Dziedzic A., Golonka L.J., Zawada T., Microelectron. Int., 19 (3) (2002), 14.10.1108/13565360210444998]Search in Google Scholar
[[15] Jurków D., Malecha K., Stiernstedt J., Golonka L., J. Eur. Ceram. Soc., 31 (2011), 1589.10.1016/j.jeurceramsoc.2011.02.034]Search in Google Scholar
[[16] Jiang B., Haber J., Renken A., Muralt P., Kiwi-Minsker L., Maeder T., Lab Chip, 15 (2015), 563.10.1039/C4LC01105H]Search in Google Scholar
[[17] Nowak K. M., Baker H. J., Hall D. R., Appl. Phys. A, 103 (4) (2011), 1033.10.1007/s00339-010-6028-y]Search in Google Scholar
[[18] Yung W.K.C., Zhu J., Microelectron. Int., 24 (3) (2007), 27.10.1108/13565360710779163]Search in Google Scholar
[[19] Smetana W., Balluch B., Stangl G., Lüftl S., Seidler S., Microelectron. Reliab., 49 (6) (2009), 592.10.1016/j.microrel.2009.02.023]Search in Google Scholar
[[20] Franz M., Atassi I., Maric A., Balluch B., Weilguni M., Smetana W., Kluge C.P., Radosavljevic G., 35th Isse, Bad Aussee, Austria, May 9 – 13, 2012.]Search in Google Scholar