Enhancing Blood Pressure Sensitivity: Innovative C-Shaped Slot Design in Microsensor Systems

In this article, we successfully developed and simulated a wearable pressure sensor for monitoring blood pressure. This sensor utilizes MEMS technology and is based on LC wireless, eliminating the need for a battery system. The sensor is constructed with a metal-insulator-metal capacitive design, featuring a diaphragm measuring 1.1 mm × 1.1 mm and with a thickness of 22 µm. Furthermore, we devised a unique C-shaped circular slot diaphragm to enhance sensitivity by reducing the mechanical rigidity of the membrane. Our design and simulation were conducted using COMSOL Multiphysics. From our findings, we observed that the frequency response to varying pressure ranged from 285 to 445 MHz. Additionally, our results yielded a mechanical sensitivity of 125.7 nm/mmHg, along with a sensor sensitivity of 1.49 fF/mmHg. Notably, the sensor with the novel C-shaped circular slot diaphragm exhibited high-pressure sensitivity, surpassing that of a clamped diaphragm by 15.5%.