<abstract xmlns="http://www.w3.org/1999/xhtml"><p>Cu doped transparent ZnO thin films (CZO) were sputtered on soda lime glass substrates at three different distances between substrate and target. The effects of copper doping on the structural and optical properties were investigated by X-ray diffraction (XRD) and transmittance measurements. The XRD results indicated that CZO thin films have a preferential crystallographic orientation along the hexagonal wurtzite (002) axis. With increasing the distance between substrate-target, from 4 cm to 8 cm, the refractive index of the CZO films decreased. In the visible wavelength region, the average value of the transmittance was above 80%. Thus, significant changes in the structural and optical properties have occurred due to the decrease of the distance between the target-substrate and the residual compressive stress at the film-substrate interface arising during deposition.</p></abstract>

Cu doped transparent ZnO thin films (CZO) were sputtered on soda lime glass substrates at three different distances between substrate and target. The effects of copper doping on the structural and optical properties were investigated by X-ray diffraction (XRD) and transmittance measurements. The XRD results indicated that CZO thin films have a preferential crystallographic orientation along the hexagonal wurtzite (002) axis. With increasing the distance between substrate-target, from 4 cm to 8 cm, the refractive index of the CZO films decreased. In the visible wavelength region, the average value of the transmittance was above 80%. Thus, significant changes in the structural and optical properties have occurred due to the decrease of the distance between the target-substrate and the residual compressive stress at the film-substrate interface arising during deposition.

Structural and optical characterization of Cu doped ZnO thin films deposited by RF magnetron sputtering

Iuliu Hatieganu University of Medicine and Pharmacy

Department of Molecular and Biomolecular Physics, National Institute for Research and Development of Isotopic and Molecular Technologies

Journal of Electrical Engineering

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Cu doped transparent ZnO thin films (CZO) were sputtered on soda lime glass substrates at three different distances between substrate and target. The effects...

Structural and optical characterization of Cu doped ZnO thin films deposited by RF magnetron sputtering

Data publikacji: 28 wrz 2019

Zakres stron: 127 - 131

Otrzymano: 19 mar 2019

DOI: https://doi.org/10.2478/jee-2019-0054

Słowa kluczowe
Cu doped ZnO, thin films, RF magnetron sputtering, XRD, optical properties

© 2019 Maria Toma et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Structural and optical characterization of Cu doped ZnO thin films deposited by RF magnetron sputtering

Data publikacji: 28 wrz 2019

Zakres stron: 127 - 131

Otrzymano: 19 mar 2019

DOI: https://doi.org/10.2478/jee-2019-0054

Słowa kluczoweCu doped ZnO, thin films, RF magnetron sputtering, XRD, optical properties

© 2019 Maria Toma et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Słowa kluczowe
Cu doped ZnO, thin films, RF magnetron sputtering, XRD, optical properties