<abstract xmlns="http://www.w3.org/1999/xhtml"><p> The paper discusses plasma methods for surface modification using the non-self-sustained glow discharge with a hollow anode. This discharge is characterised by low voltage and high values of electron and ion currents. It can be easily excited in vacuum-arc installations that are widely used for coatings deposition. It is shown that such type of discharge may be effectively used for ion pumping, film deposition, ion etching, diffusion saturation of metallic materials, fusion and brazing of metals, and for combined application of above mentioned technologies in a single vacuum cycle.</p></abstract>

The paper discusses plasma methods for surface modification using the non-self-sustained glow discharge with a hollow anode. This discharge is characterised by low voltage and high values of electron and ion currents. It can be easily excited in vacuum-arc installations that are widely used for coatings deposition. It is shown that such type of discharge may be effectively used for ion pumping, film deposition, ion etching, diffusion saturation of metallic materials, fusion and brazing of metals, and for combined application of above mentioned technologies in a single vacuum cycle.

Non-self-sustained discharge with hollow anode for plasma-based surface treatment

Institute of Plasma Physics, NSC ‘Kharkiv Institute of Physics and Technology’, 1 Akademichna Str., 61108, Kharkiv, Ukraine and Department of Applied Physics and Plasma Physics, School of Physics and Technology, V. N. Karazin Kharkiv National University, 4 Svobody sq., 61022 Kharkiv, Ukraine

Institute of Plasma Physics, NSC ‘Kharkiv Institute of Physics and Technology’, 1 Akademichna Str., 61108, Kharkiv, Ukraine

Nukleonika

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The paper discusses plasma methods for surface modification using the non-self-sustained glow discharge with a hollow anode. This discharge is characterised by...

Non-self-sustained discharge with hollow anode for plasma-based surface treatment

Data publikacji: 15 cze 2016

Zakres stron: 195 - 199

Otrzymano: 30 wrz 2015

Przyjęty: 27 lis 2015

DOI: https://doi.org/10.1515/nuka-2016-0033

© by Ivan O. Misiruk

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.