The impact of medium frequency pulsed magnetron discharge power on the single probe Langmuir measurements and resulted plasma parameters

[1]Bräuer G., Szyszka B., Vergöhl M., Bandorf R., Vacuum, 84 (2010), 1354.BräuerGSzyszkaBVergöhlMBandorfRVacuum842010135410.1016/j.vacuum.2009.12.014Search in Google Scholar

[2]Helmersson U., Lattemann M., Bohlmark J., Ehiasarian A.P., Gudmundsson J.T., Thin Solid Films, 513 (2006), 1.HelmerssonULattemannM Bohlmark JEhiasarianA.PGudmundssonJ.TThin Solid Films5132006110.1016/j.tsf.2006.03.033Search in Google Scholar

[3]Musil J., Baroch P., Vlček J., Nam K.H., Han J.G., Thin Solid Films, 475 (2005), 208.MusilJBarochPVlčekJNamK.HHanJ.GThin Solid Films475200520810.1016/j.tsf.2004.07.041Search in Google Scholar

[4]Kelly P.J., Arnell R.D., Vacuum, 56 (2000), 159.KellyP.JArnellR.DVacuum56200015910.1016/S0042-207X(99)00189-XSearch in Google Scholar

[5]Musil J., Baroch P., Vacuum, 87 (2013), 96.MusilJBarochPVacuum8720139610.1016/j.vacuum.2012.02.023Search in Google Scholar

[6]Baghriche O., Ehiasarian A.P., Kusiak-Nejman E., Pulgarin C., Sanjines R., Morawski A.W., Kiwi J., J.Photoch.Photobiol.A, 227 (2012), 11.BaghricheOEhiasarianA.PKusiak-NejmanEPulgarinCSanjinesRMorawskiA.WKiwiJJ.Photoch.Photobiol.A22720121110.1016/j.jphotochem.2011.10.017Search in Google Scholar

[7]Anders A., Surf.Coat.Technol., 205 (2011), S1.AndersASurf.Coat.Technol2052011S110.1016/j.surfcoat.2011.03.081Search in Google Scholar

[8]Lin J., Sproul W.D., Moorej.J., Wu Z., Lee S., Chistyakov R., Abraham B., Struct.Funct.Biol.ThinFilms, 63 (2011), 48.LinJSproulW.DMoorejJWuZLeeSChistyakovRAbrahamBStruct.Funct.Biol.ThinFilms6320114810.1007/s11837-011-0092-4Search in Google Scholar

[9]Gudmundsson J.T., Vacuum, 84 (2010), 1360.GudmundssonJ.TVacuum842010136010.1016/j.vacuum.2009.12.022Search in Google Scholar

[10]Anders A., Surf.Coat.Technol., 204 (2010), 2864.AndersASurf.Coat.Technol2042010286410.1016/j.surfcoat.2010.01.047Search in Google Scholar

[11]Kelly P.J., West G., Kok Y.N., Bradley J.W., Swindells I., Clarke G.C.B., Surf.Coat.Technol., 202 (2007), 952.KellyP.JWestGKokY.NBradleyJ.WSwindellsIClarkeG.C.BSurf.Coat.Technol202200795210.1016/j.surfcoat.2007.04.130Search in Google Scholar

[12]Anders A., Surf.Coat.Technol., 200 (2005), 1893.AndersASurf.Coat.Technol2002005189310.1016/j.surfcoat.2005.08.018Search in Google Scholar

[13]Musil J., Kadlec S., Münz W.D., J.Vac.Sci.Tech-nol.A, 9 (1991), 1171.MusilJKadlecSMünzW.DJ.Vac.Sci.Tech-nol.A91991117110.1116/1.577597Search in Google Scholar

[14]Rogozin A., Vinnichenko M., Shevchenko N., Kolitsch A., Müller W., Thin Solid Films, 496 Uller(2006), 197.RogozinAVinnichenkoMShevchenkoNKolitschAMüllerWThin Solid Films Uller496200619710.1016/j.tsf.2005.08.273Search in Google Scholar

[15]Britun N., Han J.G., Thin Solid Films, 516 (2008), 6542.BritunNHanJ.GThin Solid Films5162008654210.1016/j.tsf.2007.11.027Search in Google Scholar

[16]Britun N., Gaillard M., Oh S.G., Han J.G., J.Phys.D.Appl.Phys., 40 (2007), 5098.BritunNGaillardMOh S.GHanJ.GJ.Phys.D.Appl.Phys402007509810.1088/0022-3727/40/17/015Search in Google Scholar

[17]Belkind A., Zhu W., Lopez J., Becker K., Plasma Sources Sci.T., 15 (2006), S17.BelkindAZhuWLopezJBeckerKPlasma Sources Sci.T152006S1710.1088/0963-0252/15/2/S03Search in Google Scholar

[18]Bradley J.W., B äcker H., Kelly P.J., Arnell R.D., Surf.Coat.Technol., 135 (2001), 221.BradleyJ.WBäckerHKellyP.JArnellR.DSurf.Coat.Technol135200122110.1016/S0257-8972(00)00990-7Search in Google Scholar

[19]Langmuir I., Mott-Smith H.M., Phys.Rev., 28 (1926), 727.LangmuirIMott-SmithH.MPhys.Rev28192672710.1103/PhysRev.28.727Search in Google Scholar

[20]Merlino R.L., Am. J. Phys. 75 (2007), 1078.MerlinoR.LPhysAm. J752007107810.1119/1.2772282Search in Google Scholar

[21]Chen F.F., Phys.Plasmas, 14 (2007), 094703.ChenF.FPhys.Plasmas14200709470310.1063/1.2772625Search in Google Scholar

[22]Chen F.F., Phys.Plasmas, 8 (2001), 3029.ChenF.FPhys.Plasmas82001302910.1063/1.1368874Search in Google Scholar

[23]Chen F.F., Evans J.D., Arnush D., Phys.Plasmas, 9 (2002), 1449.ChenF.FEvansJ.DArnushDPhys.Plasmas92002144910.1063/1.1462630Search in Google Scholar

[24]Tichy M., Kudrna P., Behnke J.F., Csambal C., Klagge S., J.Phys., 7 (1997), 397.TichyMKudrnaPBehnkeJ.FCsambalCKlaggeSJ.Phys71997397Search in Google Scholar

[25]Window B., Savvides N., J.Vac.Sci.Technol.A,4 (1986), 196.WindowBSavvidesNJ.Vac.Sci.Technol.A4198619610.1116/1.573470Search in Google Scholar

[26]Samuell C.M., Blackwell B.D., Howard J., Corr C.S., Phys.Plasmas, 20 (2013), 034502.SamuellC.MBlackwellB.DHowardJCorrC.SPhys.Plasmas20201303450210.1063/1.4794841Search in Google Scholar

[27]Johnson J.D., Holmes A.J.T., Rev.Sci.Instrum., 61 (1990), 2628.JohnsonJ.DHolmesA.J.TRev.Sci.Instrum611990262810.1063/1.1141849Search in Google Scholar

[28]Spolaore M., Antoni V., Bagatin M., Buffa A., Cavazzana R., Desideri D., Martines E., Pomaro N., Serianni G., Tramontin L., Surf.Coat.Technol., 116 (1999), 1083.SpolaoreMAntoniVBagatinMBuffaACavazzanaRDesideriDMartinesEPomaroNSerianniGTramontinLSurf.Coat.Technol1161999108310.1016/S0257-8972(99)00122-XSearch in Google Scholar

[29]Posadowski W.M., Thin Solid Films, 392 (2001), 201.PosadowskiW.MThin Solid Films392200120110.1016/S0040-6090(01)01028-8Search in Google Scholar

[30]Brudnik A., Czapla A., Posadowski W., Vacuum, 82 (2008), 1124.BrudnikACzaplaAPosadowskiWVacuum822008112410.1016/j.vacuum.2008.01.029Search in Google Scholar

[31]Straňäk V., HubičKa Z., AdáMek P., BlažEk J., TichÞ M.,ŠPatenka P., Hippler R., Wrehdes.,Surf.Coat.Technol.,201(2006),2512.StraňäkK VHubičKaZAdáMekPBlažEkJTichÞMŠPatenkaPHipplerRWrehdeSSurf.Coat.Technol2012006251210.1016/j.surfcoat.2006.04.013Search in Google Scholar

[32]Liebig B., Braithwaite N., Kelly P.J., Chistyakov R., Abraham B., Bradley J.W., Surf.Coat.Technol., 205 (2011), S312.LiebigBBraithwaiteNKellyP.JChistyakovRAbrahamBBradleyJ.WSurf.Coat.Technol2052011S31210.1016/j.surfcoat.2011.01.017Search in Google Scholar

[33]Gudmundsson J.T., Alami J., Helmersson U., Appl.Phys.Lett., 78 (2001), 3427.GudmundssonJ.TAlamiJHelmersson UAppl.Phys.Lett782001342710.1063/1.1376150Search in Google Scholar

[34]Wiatrowski A., Vacuum, 82 (2008), 1111.WiatrowskiAVacuum822008111110.1016/j.vacuum.2008.01.027Search in Google Scholar

[35]Wiatrowski A., Posadowski W.M., Radzimski Z.J., J.Vac.Sci.Technol.A, 26 (2008) 1277.WiatrowskiAPosadowskiW.MRadzimskiZ.JJ.Vac.Sci.Technol.A262008127710.1116/1.2966436Search in Google Scholar

[36]Gencoa Ltd.: Www.Gencoa.Com/Balance_And_ Unbalance/ (2015).Gencoa Ltd.: Www.Gencoa.Com/Balance_And_ Unbalance2015Search in Google Scholar

[37]Dora J., Polish Patent No. 313150, 1996.DoraJPolish Patent No. 3131501996Search in Google Scholar

[38]Posadowski W.M., Wiatrowski A., Dora J., Radzimski Z.J., Thin Solid Films, 516 (2008), 4478.PosadowskiW.MWiatrowskiADoraJRadzimskiZ.JThin Solid Films5162008447810.1016/j.tsf.2007.05.077Search in Google Scholar

[39]Depla D., Buyle G., Haemers J., De Gryse R., Surf.Coat.Technol., 200 (2006), 4329.DeplaDBuyleGHaemersJDe GryseRSurf.Coat.Technol2002006432910.1016/j.surfcoat.2005.02.166Search in Google Scholar

[40]Bradley J.W., B äcker H., Surf.Coat.Technol., 200 (2005), 616.BradleyJ.WB ¨ AckerHSurf.Coat.Technol200200561610.1016/j.surfcoat.2005.01.074Search in Google Scholar

[41]Bradley J.W., B äcker H., Kelly P.J., Arnell R.D., Surf.Coat.Technol., 142 (2001), 337.BradleyJ.WBäckerHKellyP.JArnellR.DSurf.Coat.Technol142200133710.1016/S0257-8972(01)01084-2Search in Google Scholar

[42]Drache S., Stranak V., Herrendorf A., Cada M., Hubicka Z., Tichy M., Hippler R., Vacuum, 90 (2013), 176.DracheSStranakVHerrendorfACadaMHubickaZTichyMHipplerRVacuum90201317610.1016/j.vacuum.2012.02.047Search in Google Scholar

[43]Poolcharuansin P., Bradley J.W., Plasma Sources Sci.T, 19 (2010), 025010.PoolcharuansinPBradleyJ.WPlasma Sources Sci.T19201002501010.1088/0963-0252/19/2/025010Search in Google Scholar

[44]Passoth E., Kudrna P., Csambal C., Behnke J.F., Tich Þ; M., Helbig V., J.Phys.D:Appl.Phys, 30 (1997), 1763.PassothEKudrnaPCsambalCBehnkeJ.FTichÞMHelbig VJ.Phys.D:Appl.Phys301997176310.1088/0022-3727/30/12/013Search in Google Scholar

[45]Rossnagel S.M., J.Vac.Sci.Technol.A, 6 (1988), 1821.RossnagelS.MJ.Vac.Sci.Technol.A61988182110.1116/1.575262Search in Google Scholar

[46]Helmersson U., Lattemann M., Bohlmark J., Ehiasarian A.P., Gudmundsson J.T., Thin Solid Film, 513 (2006), 1.HelmerssonULattemannMBohlmarkJEhiasarianA.PGudmundssonJ.TThin Solid Film5132006110.1016/j.tsf.2006.03.033Search in Google Scholar

[47]Chen F.F., Lecture Notes on Langmuir Probe Diagnostics, IEEE-ICOPS meeting, Mini-Course on Plasma Di-agnostics, Jeju, Korea, June 2003, http://www.seas. ucla.edu/~ffchen/publications.htm (2015).ChenF.FLecture Notes on Langmuir Probe DiagnosticsIEEE-ICOPS meeting, Mini-Course on Plasma Di-agnostics, Jeju, Korea, June 2003http://www.seas. ucla.edu/~ffchen/publications.htm2015Search in Google Scholar