Sample | Thermal oxidation | AlN Cauchy | AlN Cauchy + Void | Al2O3 + Void | MSE | ||
---|---|---|---|---|---|---|---|
time [min] | Thickness [nm] | Thickness [nm] | Void [%] | Thickness [nm] | Void[%] | ||
test_ aln | 0 | 181 | 44 | 51 | 0 | 100 | 18.34 |
As37 | 10 | 45 | 41 | 10 | 40 | 41 | 16.39 |
As39 | 30 | 116 | 62 | 11 | 49 | 27 | 21.32 |
As38 | 50 | 78 | 87 | 9 | 58 | 19 | 23.93 |
As40 | 100 | 40 | 114 | 12 | 82 | 10 | 21.24 |
Sample | Thermal oxidation | AlN Cauchy | AlN Cauchy + Void | Al2O3 + Void | MSE | ||
---|---|---|---|---|---|---|---|
time [min] | Thickness [nm] | Thickness [nm] | Void [%] | Thickness [nm] | Void[%] | ||
test_ aln | 0 | 181 | 44 | 51 | 0 | 100 | 18.34 |
As33 | 10 | 154 | 45 | 12 | 38 | 44 | 16.13 |
As34 | 30 | 140 | 47 | 10 | 44 | 43 | 19.02 |
As35 | 50 | 134 | 48 | 11 | 45 | 44 | 19.17 |
As36 | 100 | 105 | 68 | 8 | 51 | 38 | 23.91 |
Sample | Thermal oxidation | AlN Cauchy | AlN Cauchy + Void | Al2O3 + Void | MSE | ||
---|---|---|---|---|---|---|---|
time [min] | Thickness [nm] | Thickness [nm] | Void [%] | Thickness [nm] | Void [%] | ||
X | 0 | 213 | 62 | 53.1 | 0 | 100 | 8.62 |
As19 | 10 | 140 | 72 | 13.2 | 59 | 29.2 | 7.349 |
As21 | 20 | 98 | 93 | 11.2 | 76 | 19.7 | 13.9 |
As2 | 30 | 48 | 107 | 8.7 | 124 | 17.6 | 12.69 |
As22 | 40 | 0 | 131 | 7.9 | 165 | 15.8 | 17.1 |
As20 | 50 | 0 | 105 | 7.2 | 187 | 15.3 | 12.23 |