<abstract xmlns="http://www.w3.org/1999/xhtml"><p>X-ray diffraction and x-ray absorption spectroscopy at the Cu K-edge were used to study the atomic structure in copper nitride (Cu<sub>3</sub>N) thin films. Textured nanocrystalline films are obtained upon dc magnetron sputtering on substrates heated at about 190 °C, whereas amorphous films having strongly disordered structure already in the second coordination shell of copper are deposited in the absence of heating.</p></abstract>

X-ray diffraction and x-ray absorption spectroscopy at the Cu K-edge were used to study the atomic structure in copper nitride (Cu3N) thin films. Textured nanocrystalline films are obtained upon dc magnetron sputtering on substrates heated at about 190 °C, whereas amorphous films having strongly disordered structure already in the second coordination shell of copper are deposited in the absence of heating.

Study of Copper Nitride Thin Film Structure

Institute of Solid State Physics, University of Latvia, 8 Kengaraga Str., Riga, LV-1063, LATVIA

Latvian Journal of Physics and Technical Sciences

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

{"article-title":"Study of Copper Nitride Thin Film Structure"}

X-ray diffraction and x-ray absorption spectroscopy at the Cu K-edge were used to study the atomic structure in copper nitride (Cu3N) thin films. Textured...

Study of Copper Nitride Thin Film Structure

Data publikacji: 20 maj 2016

Zakres stron: 31 - 37

DOI: https://doi.org/10.1515/lpts-2016-0011

Słowa kluczowe
copper nitride, thin film, x-ray diffraction, x-ray absorption spectroscopy

© 2016 A. Kuzmin et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Study of Copper Nitride Thin Film Structure

Data publikacji: 20 maj 2016

Zakres stron: 31 - 37

DOI: https://doi.org/10.1515/lpts-2016-0011

Słowa kluczowecopper nitride, thin film, x-ray diffraction, x-ray absorption spectroscopy

© 2016 A. Kuzmin et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Słowa kluczowe
copper nitride, thin film, x-ray diffraction, x-ray absorption spectroscopy