<abstract xmlns="http://www.w3.org/1999/xhtml"><p> We address a Boundary Integral Equation (BIE) approach for the analysis of gas dissipation in near-vacuum for Micro Electro Mechanical Systems (MEMS). Inspired by an analogy with the radiosity equation in computer graphics, we discuss an efficient way to compute the visible domain of integration. Moreover, we tackle the issue of near singular integrals by developing a set of analytical formulas for planar polyhedral domains. Finally a validation with experimental results taken from the literature is presented. </p></abstract>

We address a Boundary Integral Equation (BIE) approach for the analysis of gas dissipation in near-vacuum for Micro Electro Mechanical Systems (MEMS). Inspired by an analogy with the radiosity equation in computer graphics, we discuss an efficient way to compute the visible domain of integration. Moreover, we tackle the issue of near singular integrals by developing a set of analytical formulas for planar polyhedral domains. Finally a validation with experimental results taken from the literature is presented.

Integral equations for free-molecule ow in MEMS: recent advancements

Communications in Applied and Industrial Mathematics

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

{"article-title":"Integral equations for free-molecule ow in MEMS: recent advancements"}

We address a Boundary Integral Equation (BIE) approach for the analysis of gas dissipation in near-vacuum for Micro Electro Mechanical Systems (MEMS). Inspired...

Integral equations for free-molecule ow in MEMS: recent advancements

Data publikacji: 22 mar 2017

Zakres stron: 67 - 80

Otrzymano: 20 gru 2016

Przyjęty: 21 mar 2017

DOI: https://doi.org/10.1515/caim-2017-0004

Słowa kluczowe
Boundary Integral Equations, Rarefied Gas Dynamics, MEMS

© 2017

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Integral equations for free-molecule ow in MEMS: recent advancements

Data publikacji: 22 mar 2017

Zakres stron: 67 - 80

Otrzymano: 20 gru 2016

Przyjęty: 21 mar 2017

DOI: https://doi.org/10.1515/caim-2017-0004

Słowa kluczoweBoundary Integral Equations, Rarefied Gas Dynamics, MEMS

© 2017

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Słowa kluczowe
Boundary Integral Equations, Rarefied Gas Dynamics, MEMS