Structural and Optical Properties of Aluminium Nitride Thin Films Fabricated Using Pulsed Laser Deposition and DC Magnetron Sputtering on Various Substrates

Pubblicato online: 16 mar 2024

Pagine: 5 - 16

DOI: https://doi.org/10.2478/adms-2024-0001

Parole chiave

thin solid films, AlN, optical properties, structural properties, PLD, DC magnetron sputtering

© 2024 Ihor Virt et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.