Influence of substrate temperature and gas pressure on aluminum oxynitride coatings obtained by pulsed laser deposition

Pubblicato online: 24 feb 2017

Pagine: 254 - 264

Ricevuto: 16 ott 2016

Accettato: 22 gen 2017

DOI: https://doi.org/10.1515/msp-2017-0033

Parole chiave

aluminum oxynitride coatings, pulsed laser deposition, temperature and pressure influence, chemical composition

© 2017 Joanna Piwowarczyk, Roman Jędrzejewski, Jolanta Baranowska

This article is distributed under the terms of the Creative Commons Attribution Non-Commercial License, which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.