Influence of substrate temperature and gas pressure on aluminum oxynitride coatings obtained by pulsed laser deposition

Publié en ligne: 24 févr. 2017

Pages: 254 - 264

Reçu: 16 oct. 2016

Accepté: 22 janv. 2017

DOI: https://doi.org/10.1515/msp-2017-0033

Mots clés

aluminum oxynitride coatings, pulsed laser deposition, temperature and pressure influence, chemical composition

© 2017 Joanna Piwowarczyk, Roman Jędrzejewski, Jolanta Baranowska

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