Preliminary comparison of three processes of AlN oxidation: dry, wet and mixed ones

[1]Pearton S.J., Zolper J.C., Shul R.J., Ren F., J. Appl. Phys., 86 (1999), 1. Preliminary comparison of three processes of AlN oxidation: dry, wet and mixed onesPeartonSJZolperJCShulRJRenFJ. Appl. Phys861999110.1063/1.371145Search in Google Scholar

[2]Kim H., Park S.-J., Hwang H., J. Vac. Sci. Technol. B, 19 (2001), 579.KimHParkS-JHwangHJ. Vac. Sci. Technol. B19200157910.1116/1.1349733Search in Google Scholar

[3]Nakano Y., Jimbo T., Appl. Phys. Lett., 82 (2003), 218.NakanoYJimboTAppl. Phys. Lett82200321810.1063/1.1536029Search in Google Scholar

[4]Wu J.Y., Wang H.H., Wang Y.H., Houng M.P., IEEE Electron. Device. Lett., 20 (1999), 18.WuJYWangHHWangYHHoungMPIEEE Electron. Device. Lett2019991810.1109/55.737560Search in Google Scholar

[5]Miczek M., Mizue C., Hashizume T., Adamowicz B., J. Appl. Phys., 103 (2008), 104510.MiczekMMizueCHashizumeTAdamowiczBJ. Appl. Phys103200810451010.1063/1.2924334Search in Google Scholar

[6]Bidzinski P., Miczek M., Adamowicz B., Mizue CH., Hashizume T., Jpn. J. Appl. Phys., 50 (2011), 04DF08.BidzinskiPMiczekMAdamowiczBMizueCHHashizumeTJpn. J. Appl. Phys50201104DF0810.7567/JJAP.50.04DF08Search in Google Scholar

[7]Korbutowicz R., Prażmowska J., Wet thermal oxidation of GaAs and GaN. In: GRYM J. (Ed.), Semiconductor technologies, In-The, Vukovar, 2010, p. 105.KorbutowiczRPrażmowskaJWet thermal oxidation of GaAs and GaNGrymJ.Semiconductor technologiesIn-The, Vukovar201010510.5772/8555Search in Google Scholar

[8]Korbutowicz R., Prażmowska J., Wągrowski Z., Szyszka A., Tłaczała M., Procedings of ASDAM 2008, Smolenice, Slovakia, 2008, 163.KorbutowiczRPrażmowskaJWągrowskiZSzyszkaATłaczałaMProcedings of ASDAM 2008Smolenice, Slovakia2008163Search in Google Scholar

[9]Bruggeman D.A.G., Ann. Phys.-Leipzig, 24 (5) (1935), 636.BruggemanDAGAnn. Phys.-Leipzig245193563610.1002/andp.19354160705Search in Google Scholar

[10]Zollner S., Konkar A., Gregory R.B., Wilson S.R., Nikishin S.A., Temkin H., MRS Spring Meeting San Francisco, 1999, Paper Y5.21.ZollnerSKonkarAGregoryRBWilsonSRNikishinSATemkinHMRS Spring Meeting San Francisco1999Paper Y5.21Search in Google Scholar