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Novel Method of Contactless Sensing of Mechanical Quantities

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24 juil. 2020
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This article addresses the method of sensing mechanical quantities, in particular force and pressure, without the electrical connection of the sensing element and the electronics. The information about the mechanical quantity is transmitted only by evaluating the changes in the electromagnetic field created around the sensor. The sensor is designed on the basis of a flexible micro-electro-mechanical element (MEMS), the resonance of which carries the information about the measured quantity.