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Optical properties of AlN layers obtained by magnetron sputtering

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Piotr Potera
Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
Grzegorz Wisz
Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
Łukasz Szyller
Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
eISSN:
2083-134X
Langue:
Anglais