Method of Optimal Measurement Strategy for Ultra-High-Precision Machine in Roundness Nanometrology

Publié en ligne: 01 juin 2015

Pages: 896 - 920

Reçu: 29 nov. 2014

Accepté: 26 mars 2015

DOI: https://doi.org/10.21307/ijssis-2017-788

Mots clés

Nanometrology, Talyrond instrument, roundness, reference algorithms, software fitting filters, uncertainty and evaluation method

© 2015 Salah H. R. Ali published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.