Method of Optimal Measurement Strategy for Ultra-High-Precision Machine in Roundness Nanometrology

Online veröffentlicht: 01. Juni 2015

Seitenbereich: 896 - 920

Eingereicht: 29. Nov. 2014

Akzeptiert: 26. März 2015

DOI: https://doi.org/10.21307/ijssis-2017-788

Schlüsselwörter

Nanometrology, Talyrond instrument, roundness, reference algorithms, software fitting filters, uncertainty and evaluation method

© 2015 Salah H. R. Ali published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.