<abstract xmlns="http://www.w3.org/1999/xhtml">

<p>Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structure of the glass substrate. Micro-channel was fabricated by molding of PDMS polymer on patterned SU-8 ridge structure. Structural characterization of the fabricated structures were investigated using optical microscope and SEM.</p>
</abstract>

Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structure of the glass substrate. Micro-channel was fabricated by molding of PDMS polymer on patterned SU-8 ridge structure. Structural characterization of the fabricated structures were investigated using optical microscope and SEM.

Microstructuring of SU-8 Resist for MEMS and Bio-Applications

International Journal on Smart Sensing and Intelligent Systems

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

{"article-title":"Microstructuring of SU-8 Resist for MEMS and Bio-Applications"}

Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported....

Microstructuring of SU-8 Resist for MEMS and Bio-Applications

Publié en ligne: 13 déc. 2017

Pages: 118 - 129

DOI: https://doi.org/10.21307/ijssis-2017-384

© 2010 P.K. Dey et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.