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Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

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Q. Liang
College of Electrical and Information Engineering, Hunan University, Changsha, Hunan, 410082, China
W. Wu
College of Electrical and Information Engineering, Hunan University, Changsha, Hunan, 410082, China
D. Zhang
Faculty of Engineering and Applied Science, University of Ontario Institute of Technology, Oshawa, ON L1H 7K4, Canada
B. Wei
Faculty of Engineering and Applied Science, University of Ontario Institute of Technology, Oshawa, ON L1H 7K4, Canada
W. Sun
College of Electrical and Information Engineering, Hunan University, Changsha, Hunan, 410082, China
Y. Wang
College of Electrical and Information Engineering, Hunan University, Changsha, Hunan, 410082, China
Y. Ge
State Key Laboratories of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei, Anhui 230031, China
eISSN:
1335-8871
Langue:
Anglais
Périodicité:
6 fois par an
Sujets de la revue:
Engineering, Electrical Engineering, Control Engineering, Metrology and Testing