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Schematic cross section of the test GaAs multilayer sample.E-CV (a) and SCM (b) profile of the GaAs test sample.Calibration curves of SCM measurement.Schematic cross section of InGaAs tunnel junction sample.E-CV (a) and SCM (b) profiles of InGaAs tunnel junction sample.Schematic cross-section of AlGaN/GaN/Si heterostructure.Topography profile (blue) and SCM signal scan (red) of AlGaN/GaN/Si heterostructure.